Coupling and tuning of modal frequencies in direct current biased microelectromechanical systems arrays
نویسندگان
چکیده
microelectromechanical systems arrays Prashant N. Kambali, Gyanadutta Swain, Ashok Kumar Pandey, Eyal Buks, and Oded Gottlieb Department of Mechanical and Aerospace Engineering, IIT Hyderabad, Yeddumailaram 502205, India Faculty of Electrical Engineering, Technion-Israel Institute of Technology, Haifa 32000, Israel Faculty of Mechanical Engineering, Technion-Israel Institute of Technology, Haifa 32000, Israel
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